Enhanced Fault Detection in MicroLEDs through Microphotoluminescence Microscope Construction

Document Type : Original Article

Author

Shiraz university

Abstract

The microphotoluminescence microscope is created by integrating 405 nm excitation lasers into an existing standard microscope. These lasers are used to stimulate the photoluminescence bands of blue microLEDs, which emit light at 450 nm. Any defective or shorted microLED quantum wells do not emit light and appear dark, allowing for their automatic recognition using image processing techniques. Early identification of defective microLEDs during wafer processing in the LED facility can help eliminate faulty wafers promptly, reducing manufacturing costs. Additionally, the microscope enables the comparison of microLED quality within wafer batches during quality assurance and the detection of major defects that may not be recognizable using regular microscopes.

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