University of Tabriz Tabriz Journal of Electrical Engineering 2008-7799 55 3 2025 12 22 Enhanced Fault Detection in MicroLEDs through Microphotoluminescence Microscope Construction Enhanced Fault Detection in MicroLEDs through Microphotoluminescence Microscope Construction 615 621 18679 10.22034/tjee.2024.61975.4858 FA Mohammad Hendijanifard School of Mechanical Engineering, Shiraz University, Shiraz, Iran Journal Article 2024 06 12 The microphotoluminescence microscope has been developed by integrating 405 nm excitation lasers into a conventional optical microscope system, enabling enhanced characterization of microLED devices. These lasers excite the photoluminescence bands of blue microLEDs, which emit at a wavelength of 450 nm. Defective or short-circuited microLED quantum wells fail to emit light under excitation and thus appear as dark spots in the captured images. This contrast facilitates the automatic identification and mapping of faulty microLEDs through advanced image processing algorithms. Early detection of defective microLEDs at the wafer processing stage within LED manufacturing facilities is crucial, as it allows manufacturers to promptly discard or reprocess faulty wafers, significantly reducing production costs and improving overall yield. Furthermore, the microphotoluminescence microscope provides a powerful tool for quality assurance by enabling detailed comparisons of microLED quality across different wafer batches. It also enhances the detection of substantial defects that can easily be overlooked by conventional microscopy techniques. Overall, the integration of this technology offers a cost-effective and efficient approach for in-line inspection and quality control in microLED production. The microphotoluminescence microscope has been developed by integrating 405 nm excitation lasers into a conventional optical microscope system, enabling enhanced characterization of microLED devices. These lasers excite the photoluminescence bands of blue microLEDs, which emit at a wavelength of 450 nm. Defective or short-circuited microLED quantum wells fail to emit light under excitation and thus appear as dark spots in the captured images. This contrast facilitates the automatic identification and mapping of faulty microLEDs through advanced image processing algorithms. Early detection of defective microLEDs at the wafer processing stage within LED manufacturing facilities is crucial, as it allows manufacturers to promptly discard or reprocess faulty wafers, significantly reducing production costs and improving overall yield. Furthermore, the microphotoluminescence microscope provides a powerful tool for quality assurance by enabling detailed comparisons of microLED quality across different wafer batches. It also enhances the detection of substantial defects that can easily be overlooked by conventional microscopy techniques. Overall, the integration of this technology offers a cost-effective and efficient approach for in-line inspection and quality control in microLED production. https://tjee.tabrizu.ac.ir/article_18679_20f1c9afde3ffea2d4c06dc42974be84.pdf